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Submitting organization
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Finland on behalf of the European Community and its member States
Leena Tarkiainen
Ministry of the Environment
POB 380
FIN-00131 Helsinki
tel: +358 9 1991 9741
fax: +358 9 1991 9439
email: leena.tarkiainen@vyh.fi
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Date of submission
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16 July 1999
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Type
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Technology, improved system design
Improved operation and maintenance procedures
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Category
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Semiconductors manufacturing
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Gases affected
(reduced, recovered, destroyed, replaced, avoided)
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CF4
C2F6
C3F8
c-C4F8
SF6
HFC-23
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General description
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PFCs are emitted from semiconductor manufacturing processes. Listing of potential reduction options for this
source is difficult. This is due to the complexity of the production process and the rapid rate at which
processes change in this dynamic industry. It has been reported, though, that efforts to develop ways to
measure these emissions are being undertaken by industry leaders throughout the world (IPCC 1999c).
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Impacts on ozone depletion
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Impacts on global warming
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Other environmental impacts
(e.g. toxicity, flammability or other air emissions)
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Economic impacts
(cost)
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Timing issues
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Examples of application
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Regional availability or applicability
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Other remarks
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Sources of additional information
(what and where)
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IPCC 1999c. "Expert Group Meeting on Good Practice in Inventory Preparation - Industrial Processes and
New Gases: PFC, HFC, and SF6 Emissions from Semiconductor Manufacturing (DRAFT)". IPCC/OECD/IEA
Programme on National Greenhouse Gas Inventories.
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Link to additional information
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